6

Heavy doping parameters estimated from transistor measurements

Year:
1988
Language:
english
File:
PDF, 800 KB
english, 1988
14

Doping of trench capacitors by rapid thermal diffusion

Year:
1991
Language:
english
File:
PDF, 264 KB
english, 1991
19

Defect Generation and Gettering during Rapid Thermal Annealing

Year:
1988
Language:
english
File:
PDF, 2.09 MB
english, 1988
25

Stress Effects in 2d Arsenic Diffusion in Silicon

Year:
1995
Language:
english
File:
PDF, 925 KB
english, 1995
26

Surface Effects in Silicon Doping with Boron During Proximity Rapid Thermal Diffusion

Year:
1995
Language:
english
File:
PDF, 351 KB
english, 1995